2/9/2011	7:23:02 AM	Recipe started at 7:23 AM
2/9/2011	7:23:02 AM	Helium valve closed
2/9/2011	7:23:02 AM	BCl3 valve closed
2/9/2011	7:23:02 AM	PH3 valve closed
2/9/2011	7:23:02 AM	SiCl4 pre valve closed
2/9/2011	7:23:02 AM	SiCl4 post valve closed
2/9/2011	7:23:02 AM	Main Vac valve closed
2/9/2011	7:23:02 AM	Bypass valve closed
2/9/2011	7:23:02 AM	Bubbler valve closed
2/9/2011	7:23:02 AM	H2 valve opened
2/9/2011	7:23:02 AM	Helium MFC set to  0.000000
2/9/2011	7:23:02 AM	H2 MFC set to  500.000000
2/9/2011	7:23:02 AM	BCl3 MFC set to  0.000000
2/9/2011	7:23:02 AM	PHl3 MFC set to  0.000000
2/9/2011	7:23:02 AM	SiCl4 MFC set to  0.000000
2/9/2011	7:23:02 AM	Bypass solenoid MFC set to  0.000000
2/9/2011	7:23:02 AM	Tube furnace set to 0
2/9/2011	7:24:26 AM	Helium valve closed
2/9/2011	7:24:26 AM	BCl3 valve closed
2/9/2011	7:24:26 AM	PH3 valve closed
2/9/2011	7:24:26 AM	SiCl4 pre valve closed
2/9/2011	7:24:26 AM	SiCl4 post valve closed
2/9/2011	7:24:26 AM	Main Vac valve closed
2/9/2011	7:24:26 AM	Bypass valve closed
2/9/2011	7:24:26 AM	H2 valve opened
2/9/2011	7:24:26 AM	Bubbler valve opened
2/9/2011	7:24:26 AM	Helium MFC set to  0.000000
2/9/2011	7:24:26 AM	H2 MFC set to  500.000000
2/9/2011	7:24:26 AM	BCl3 MFC set to  0.000000
2/9/2011	7:24:26 AM	PHl3 MFC set to  0.000000
2/9/2011	7:24:26 AM	SiCl4 MFC set to  0.000000
2/9/2011	7:24:26 AM	Bypass solenoid MFC set to  0.000000
2/9/2011	7:24:26 AM	Tube furnace set to 1000
2/9/2011	7:44:26 AM	Helium valve closed
2/9/2011	7:44:26 AM	PH3 valve closed
2/9/2011	7:44:26 AM	Main Vac valve closed
2/9/2011	7:44:26 AM	Bypass valve closed
2/9/2011	7:44:26 AM	H2 valve opened
2/9/2011	7:44:26 AM	BCl3 valve opened
2/9/2011	7:44:26 AM	SiCl4 pre valve opened
2/9/2011	7:44:26 AM	SiCl4 post valve opened
2/9/2011	7:44:26 AM	Bubbler valve opened
2/9/2011	7:44:26 AM	Helium MFC set to  0.000000
2/9/2011	7:44:26 AM	H2 MFC set to  500.000000
2/9/2011	7:44:26 AM	BCl3 MFC set to  3.000000
2/9/2011	7:44:26 AM	PHl3 MFC set to  0.000000
2/9/2011	7:44:26 AM	SiCl4 MFC set to  50.000000
2/9/2011	7:44:26 AM	Bypass solenoid MFC set to  0.000000
2/9/2011	7:44:26 AM	Tube furnace set to 1000
2/9/2011	7:59:26 AM	H2 valve closed
2/9/2011	7:59:26 AM	BCl3 valve closed
2/9/2011	7:59:26 AM	PH3 valve closed
2/9/2011	7:59:26 AM	SiCl4 pre valve closed
2/9/2011	7:59:26 AM	SiCl4 post valve closed
2/9/2011	7:59:26 AM	Main Vac valve closed
2/9/2011	7:59:26 AM	Bypass valve closed
2/9/2011	7:59:26 AM	Helium valve opened
2/9/2011	7:59:26 AM	Bubbler valve opened
2/9/2011	7:59:26 AM	Helium MFC set to  500.000000
2/9/2011	7:59:26 AM	H2 MFC set to  0.000000
2/9/2011	7:59:26 AM	BCl3 MFC set to  0.000000
2/9/2011	7:59:26 AM	PHl3 MFC set to  0.000000
2/9/2011	7:59:26 AM	SiCl4 MFC set to  0.000000
2/9/2011	7:59:26 AM	Bypass solenoid MFC set to  0.000000
2/9/2011	7:59:26 AM	Tube furnace set to 0
2/9/2011	8:19:26 AM	Helium valve closed
2/9/2011	8:19:26 AM	H2 valve closed
2/9/2011	8:19:26 AM	BCl3 valve closed
2/9/2011	8:19:26 AM	PH3 valve closed
2/9/2011	8:19:26 AM	SiCl4 pre valve closed
2/9/2011	8:19:26 AM	SiCl4 post valve closed
2/9/2011	8:19:26 AM	Main Vac valve closed
2/9/2011	8:19:26 AM	Bypass valve closed
2/9/2011	8:19:26 AM	Bubbler valve closed
2/9/2011	8:19:26 AM	Helium MFC set to  0.000000
2/9/2011	8:19:26 AM	H2 MFC set to  0.000000
2/9/2011	8:19:26 AM	BCl3 MFC set to  0.000000
2/9/2011	8:19:26 AM	PHl3 MFC set to  0.000000
2/9/2011	8:19:26 AM	SiCl4 MFC set to  0.000000
2/9/2011	8:19:26 AM	Bypass solenoid MFC set to  0.000000
2/9/2011	8:19:26 AM	Tube furnace set to 0
2/9/2011	8:19:27 AM	Run finished at 8:19 AM
2/9/2011	8:51:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/9/2011	8:51:39 AM	Recipe started at 8:51 AM
2/9/2011	8:51:39 AM	H2 valve closed
2/9/2011	8:51:39 AM	BCl3 valve closed
2/9/2011	8:51:39 AM	PH3 valve closed
2/9/2011	8:51:39 AM	SiCl4 pre valve closed
2/9/2011	8:51:39 AM	SiCl4 post valve closed
2/9/2011	8:51:39 AM	Main Vac valve closed
2/9/2011	8:51:39 AM	Bypass valve closed
2/9/2011	8:51:39 AM	Bubbler valve closed
2/9/2011	8:51:39 AM	Helium valve opened
2/9/2011	8:51:39 AM	Helium MFC set to  500.000000
2/9/2011	8:51:39 AM	H2 MFC set to  0.000000
2/9/2011	8:51:39 AM	BCl3 MFC set to  0.000000
2/9/2011	8:51:39 AM	PHl3 MFC set to  0.000000
2/9/2011	8:51:39 AM	SiCl4 MFC set to  0.000000
2/9/2011	8:51:39 AM	Bypass solenoid MFC set to  0.000000
2/9/2011	8:51:39 AM	Tube furnace set to 0
2/9/2011	8:51:42 AM	Helium valve closed
2/9/2011	8:51:42 AM	H2 valve closed
2/9/2011	8:51:42 AM	BCl3 valve closed
2/9/2011	8:51:42 AM	PH3 valve closed
2/9/2011	8:51:42 AM	SiCl4 pre valve closed
2/9/2011	8:51:42 AM	SiCl4 post valve closed
2/9/2011	8:51:42 AM	Main Vac valve closed
2/9/2011	8:51:42 AM	Bypass valve closed
2/9/2011	8:51:42 AM	Bubbler valve closed
2/9/2011	8:51:42 AM	Helium MFC set to  0.000000
2/9/2011	8:51:42 AM	H2 MFC set to  0.000000
2/9/2011	8:51:42 AM	BCl3 MFC set to  0.000000
2/9/2011	8:51:42 AM	PHl3 MFC set to  0.000000
2/9/2011	8:51:42 AM	SiCl4 MFC set to  0.000000
2/9/2011	8:51:42 AM	Bypass solenoid MFC set to  0.000000
2/9/2011	8:51:43 AM	Tube furnace set to 0
2/9/2011	8:51:43 AM	Run finished at 8:51 AM
2/9/2011	8:51:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/9/2011	1:35:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/9/2011	1:35:17 PM	Recipe started at 1:35 PM
2/9/2011	1:35:17 PM	Helium valve closed
2/9/2011	1:35:17 PM	H2 valve closed
2/9/2011	1:35:17 PM	BCl3 valve closed
2/9/2011	1:35:17 PM	PH3 valve closed
2/9/2011	1:35:17 PM	SiCl4 pre valve closed
2/9/2011	1:35:17 PM	SiCl4 post valve closed
2/9/2011	1:35:17 PM	Main Vac valve closed
2/9/2011	1:35:17 PM	Bubbler valve closed
2/9/2011	1:35:17 PM	Bypass valve opened
2/9/2011	1:35:17 PM	Helium MFC set to  0.000000
2/9/2011	1:35:17 PM	H2 MFC set to  0.000000
2/9/2011	1:35:17 PM	BCl3 MFC set to  0.000000
2/9/2011	1:35:17 PM	PHl3 MFC set to  0.000000
2/9/2011	1:35:17 PM	SiCl4 MFC set to  0.000000
2/9/2011	1:35:17 PM	Bypass solenoid MFC set to  0.000000
2/9/2011	1:35:17 PM	Tube furnace set to 0
2/9/2011	1:35:54 PM	Helium valve closed
2/9/2011	1:35:54 PM	H2 valve closed
2/9/2011	1:35:54 PM	BCl3 valve closed
2/9/2011	1:35:54 PM	PH3 valve closed
2/9/2011	1:35:54 PM	SiCl4 pre valve closed
2/9/2011	1:35:54 PM	SiCl4 post valve closed
2/9/2011	1:35:54 PM	Bubbler valve closed
2/9/2011	1:35:54 PM	Main Vac valve opened
2/9/2011	1:35:54 PM	Bypass valve opened
2/9/2011	1:35:54 PM	Helium MFC set to  0.000000
2/9/2011	1:35:54 PM	H2 MFC set to  0.000000
2/9/2011	1:35:54 PM	BCl3 MFC set to  0.000000
2/9/2011	1:35:54 PM	PHl3 MFC set to  0.000000
2/9/2011	1:35:54 PM	SiCl4 MFC set to  0.000000
2/9/2011	1:35:54 PM	Bypass solenoid MFC set to  0.000000
2/9/2011	1:35:54 PM	Tube furnace set to 0
2/9/2011	1:35:54 PM	Run finished at 1:35 PM
2/9/2011	1:35:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/9/2011	5:26:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/9/2011	5:26:56 PM	Recipe started at 5:26 PM
2/9/2011	5:26:56 PM	Helium valve closed
2/9/2011	5:26:56 PM	H2 valve closed
2/9/2011	5:26:56 PM	BCl3 valve closed
2/9/2011	5:26:56 PM	PH3 valve closed
2/9/2011	5:26:56 PM	SiCl4 pre valve closed
2/9/2011	5:26:56 PM	SiCl4 post valve closed
2/9/2011	5:26:56 PM	Main Vac valve closed
2/9/2011	5:26:56 PM	Bypass valve closed
2/9/2011	5:26:56 PM	Bubbler valve closed
2/9/2011	5:26:56 PM	Helium MFC set to  0.000000
2/9/2011	5:26:56 PM	H2 MFC set to  0.000000
2/9/2011	5:26:56 PM	BCl3 MFC set to  0.000000
2/9/2011	5:26:56 PM	PHl3 MFC set to  0.000000
2/9/2011	5:26:56 PM	SiCl4 MFC set to  0.000000
2/9/2011	5:26:56 PM	Bypass solenoid MFC set to  0.000000
2/9/2011	5:26:56 PM	Tube furnace set to 0
2/9/2011	5:26:56 PM	Run finished at 5:26 PM
2/9/2011	5:26:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
